Metrology

2 pieces tagged Metrology.

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imec Says Fabs Can't Measure Every Wafer. So 95% Are Predicted.

In a fab running virtual metrology, only one to five percent of wafers are physically measured. The rest get a number anyway — predicted by a model that reads the process tools rather than the wafer: gas flows, RF power, chamber pressure, roughly a thousand sensor variables per run, turned into a thickness, a line…

16 Aug 20262:04tip inside

AI Now Lets Chip Fabs "Measure" Wafers They Never Touch (Virtual Metrology)

Chip factories physically measure only about 3 wafers in 100. For the other 97, an AI called virtual metrology predicts the exact dimension straight from the process tool's own sensor "fingerprint" — pressure, power, gas flow, hundreds of signals per wafer — in milliseconds, with no measurement step and no throughput hit.

18 Jul 20262:07tip inside