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imec Says Fabs Can't Measure Every Wafer. So 95% Are Predicted.

In a fab running virtual metrology, only one to five percent of wafers are physically measured. The rest get a number anyway — predicted by a model that reads the process tools rather than the wafer: gas flows, RF power, chamber pressure, roughly a thousand sensor variables per run, turned into a thickness, a line…

16 Aug 20262:04tip inside
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